基于壓電晶體的微質量檢測系統(tǒng)研究進展
武威
廣東白云學院 機電工程學院,廣東 廣州 510450
摘 要:壓電晶體傳感器利用壓電石英晶體振蕩頻率對晶體表面質量負載和表面性狀的高度敏感性,來實現(xiàn)對物質微質量的檢測。介紹了壓電晶體傳感器的原理,給出了檢測系統(tǒng)的硬件組成及數(shù)據(jù)處理與分析軟件設計,分析了其應用現(xiàn)狀,并對該檢測系統(tǒng)的發(fā)展趨勢進行了展望。
關鍵詞:壓電晶體傳感器;微質量;檢測系統(tǒng)
中圖分類號:TP212 文獻標識碼:A 文章編號:1007-3175(2013)12-0005-05
Research Evolution on Micro-Quality Detection System Based on Piezoelectric Crystal
WU Wei
Electro-Mechanical School, Guangdong Baiyun University, Guangzhou 510450, China
Abstract: The piezoelectric crystal sensors used the characteristic that the oscillation frequency of the piezoelectric crystal is highly sensitive to the load and properties on crystal surface, such as density, viscosity, conductivity and dielectric constant to carry out materials micro-quality test. Introduction was made to the principle of the piezoelectric crystal sensors. This paper designed the hardware composition, data processing and analysis software of the detection system and analyzed the system’s application actuality, looking forward to the development trend of the detection system.
Key words: piezoelectric crystal sensor; micro-quality; detection system
參考文獻
[1] Yeolho Lee, Lim Geunbae, Wonkyu Moon.A Piezoelectric Micro-Cantilever Bio-Sensor Using the Mass-Micro-Balancing Technique with Self-Excitation[C]//The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005.
[2] Mortet V, Petersen R, Haenena K, et al. Piezoelectric Bimorph Micro-Cantilever:A New Gas Pressure Sensor[C]//2005 IEEE Ultrasonics Symposium, 2005.
[3] 吳曉娟,劉波,張楨,等.一種頻差檢測系統(tǒng)在電化學中的應用[J].儀表技術與傳感器,2000(11):13-14.
[4] 劉盛平,陳國明,周奇,等.多通道壓電禽流感快速檢測系統(tǒng)及應用研究[J].儀器儀表學報,2008,29(8):1583-1587.
[5] 王磊磊,萬輝,曾慶音,等.基于壓電晶體傳感器陣列技術的智能分析儀[J].分析科學學報,2001,17(3):235-238.
[6] 俞凡,殷瑋,許華勝,等.石英諧振靶基因組合檢測儀振蕩電路的研究[J].第三軍醫(yī)大學學報,2002,24(1):6-7.
[7] 張劍鋒,馬希直,張優(yōu)云.石英晶體微天平傳感器在油品黏度中的應用研究[J].西安交通大學學報,2002,36(5):511-514.
[8] 張波,府偉靈,蔣天倫,等.壓電石英晶體傳感器液相檢測的影響因素[J].第三軍醫(yī)大學學報,2002,24(1):8-11.
[9] 毛軍剛,曾慶音,周曉東,等.便攜式智能多道石英晶體微天平的研制與應用[J].分析化學,2003,31(2):245-248.
[10] 熊興良,王翔,李苑,等.石英晶體微天平的測量儀的研究及應用[J].分析化學,2005,33(12):1803-1806.
[11] 呂家云,周曉峰,張健,等.涂敷ZnO納米線的石英晶體微天平的濕度敏感特性[J].功能材料與器件學報,2008,14(3):645-650.
[12] 劉峰偉.壓電生物傳感器及其采集分析系統(tǒng)的研究[D].重慶:重慶大學,2008.
[13] 高燕,熊焰,李京文.壓電免疫傳感器的實現(xiàn)[J].傳感器世界,2008,14(5):16-18.
[14] Chou F F, Chang H W, Li T L, Shih J S. Piezoelectric Crystal/Surface Acoustic Wave Biosensors Based on Fullerene C60 and Enzymes/Antibodies/Proteins[J].Chemical Society, 2008,5(1):1-15.
[15] 王久才,蔣海峰,張培仁.基于頻譜分析的QCM信號采集系統(tǒng)[J].儀表技術與傳感器,2006(2):23-24.
[16] 鎖斌.阻抗法石英晶體液體黏度測量系統(tǒng)[D].天津:天津大學,2007.